2020
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2020 Next Generation Lithography Conference
Nov. 18~19, 2020
Online Conference
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- ±¸µÎ¹ßÇ¥(11¿ù 18ÀÏ)
- ±¸µÎ¹ßÇ¥(11¿ù 19ÀÏ)
- Æ÷½ºÅ͹ßÇ¥(11¿ù 18ÀÏ)
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Full Program
11¿ù 18ÀÏ (¼ö¿äÀÏ)
W-PM I
Patterning Material I
ÁÂÀå :
ÀÌÁø±Õ(ÀÎÇÏ´ëÇб³)
13:00-14:30
W-MI I
Metrology / Inspection I
ÁÂÀå :
À̺´È£(SK ÇÏÀ̴нº)
13:00-14:15
W-PM II
Patterning Material II
ÁÂÀå :
±è¸í¿õ(ÀÎÇÏ´ëÇб³)
14:40-15:55
W-MI II
Metrology / Inspection II
ÁÂÀå :
¹Úº´Ãµ(KRISS)
14:40-15:55
W-EU I
Extreme UV / Optical Lithography I
ÁÂÀå :
ÇöÀ±¼®(ASML)
16:05-17:35
W-MI III
Metrology / Inspection III
ÁÂÀå :
ÀÌÁØÈ£(°øÁÖ´ëÇб³)
16:05-17:20
Contacts
Tel.: 041-530-2790, E-mail: cnst@sunmoon.ac.kr
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Unauthorized recording / reproduction of presentation materials is prohibited.
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