2020 차세대 리소그래피 학술대회

2020 Next Generation Lithography Conference
Nov. 18~19, 2020

Online Conference

Full Program
PS9
Applied and Emerging Topics
PS9-1
6
Ion-beam implantation for fabrication of thin radar stealth devices embedded in a dielectric surface
심현보(연세대학교), 조원제(한국원자력연구원), 한재원(연세대학교)