2020 차세대 리소그래피 학술대회

2020 Next Generation Lithography Conference
Nov. 18~19, 2020

Online Conference

Full Program
PS2
Modeling / Computational Lithography
PS2-1
6
Pattern quality enhancement in digital maskless lithography by DMD modulation
이창민, 고윤혁, 한재원(연세대학교)