2020 Â÷¼¼´ë ¸®¼Ò±×·¡ÇÇ Çмú´ëȸ

2020 Next Generation Lithography Conference
Nov. 18~19, 2020

Online Conference

Full Program
11¿ù 19ÀÏ (¸ñ¿äÀÏ)
T-XR I
X-ray Source / Instrumentation Applications
ÁÂÀå : °­°æÅÂ(KITECH) 13:00-14:30
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T-XR I-1
0
Micro- and nano-focus digital x-ray sources for semiconductor inspections
¼ÛÀ±È£, Á¤Áø¿ì, ¹Ú¼Ò¶ó, ±èÀç¿ì, °­ÁØÅÂ, À±±â³², ±è¼ºÁØ, ¾ç¿ë¼®, ÀÌ¸í·¡, °íÀº¼Ö, ÀÌÁ¤¿õ, ¾ÈÀ¯Á¤, ¿¬Áöȯ, ±è¼ºÈñ(ETRI)
T-XR I-2
0
Recent research and development in scintillator field for digital X-ray imaging detector
Â÷º¸°æ(Çѱ¹Àü±â¿¬±¸¿ø)
T-XR I-3
0
ÀÇ·á¿ë X-ray ¼¾¼­¿¡ Àû¿ë °¡´ÉÇÑ ÁõÂøÇü À¯±â ±¤¼¾¼­ °³¹ß
¾È°Ç½Ä, ±èä¿ø, Á¶°üÇö, ¹è½Âȯ(Çѱ¹»ý»ê±â¼ú¿¬±¸¿ø), Â÷º¸°æ(Çѱ¹Àü±â¿¬±¸¿ø), °­°æÅÂ(Çѱ¹»ý»ê±â¼ú¿¬±¸¿ø)