2020 차세대 리소그래피 학술대회

2020 Next Generation Lithography Conference
Nov. 18~19, 2020

Online Conference

Full Program
11월 18일 (수요일)
W-PM I
Patterning Material I
좌장 : 이진균(인하대학교) 13:00-14:30
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W-PM I-1
1
Simulations Studies in Patterning Materials Development  
허수미(전남대학교)
W-PM I-2
1
Photosensitive Crosslinkable Polymeric Systems to Form Functional Surfaces Utilizable for Lithographic Applications
김명웅(인하대학교)
W-PM I-3
2
Generalized Orientation Strategy of Block Copolymer Microdomains in Thin Films for Sub-10 nm Directed Self-Assembly
손정곤(한국과학기술연구원)